无掩膜激光直写应用

With an installation base of over 800 systems in more than 52 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high-precision maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.